FP-80C
Semi Automated FOUP Cleaner
FP-80C is a semi automated FOUP cleaning machine designed to clean various wafer carriers (e.g., SMIF POD, FOUP, FOSB, Cassette, Reticle Box) and meeting strict metal ion and particle cleaning requirements. It’s ideal for semiconductor
industries like wafer manufacturing and advanced packaging. The drying process combines centrifugal force, hot air, and IR baking, ensuring fast, streak-free drying.
Key Features
Rotary Centrifugal Cleaning
Misalignment Protection Function
IR Baking System for Accelerated Drying
Servo System-Controlled Spindle
Single Fluid and Dual Fluid Cleaning Options
Automatic Status Display
Application
12” FOUP
12” FOSB
6” Insert
8” Cassette + POD
