FP-120V
Fully Auto FOUP Cleaner
FP-120V is a fully automatic cleaning machine suitable to clean wafer carriers such as FOUP, FOSB & cassette. FP-120V removes movable impurities, dust, and other harmful contaminants inside the FOUPs to prevent secondary contamination of the products inside the FOUPs, better meeting the ever increasing demands of customers for high quality and high reliability.
Key Features
Sealed Independent Cleaning Chambers with Process Optimization
N2 Filling and Humidity Monitoring to Prevent Secondary Contamination
Vacuum Dehumidification (Option) for Ultra-Low Humidity Requirements
Load Port and E84 Sensor for Efficient OHT Integration
Slot Mapping Detection (Option) for Real-Time Wafer Status Monitoring
Industrial PC and PLC Control for Easy Operation with SECS/GEM Support
Application
12” FOUP
