CO2-2000 / CO2-3000
The CO2 Bubbling Machine is a supporting unit designed to deliver and distribute CO2 chemical liquid to the main cleaning equipment. This system is engineered for seamless integration with main cleaning equipment, offering reliable performance, precise control, and continuous delivery of CO2 chemical liquid. Its robust design helps optimize cleaning efficiency, reduce downtime, and maintain process stability in advanced semiconductor and electronics cleaning applications.
Key Features
Anti-corrosion Design
DICO 2 Generator Equipped
Option of Split or Integrated Filters
User-friendly PLC Control System
Constant Pressure System
Safety Feature Available
How It Works
1. CO2 Injection:
A CO2 injector introduces gaseous CO2 into purified deionized (DI) water.
2. DI-CO2 Water Generation:
The dissolved CO2 acidifies the water and lowers its resistivity, reducing static electricity on the semiconductor wafer.
3. Bubble Generation:
The injection process creates bubbles (often referred to as microbubbles or nanobubbles) within the DI water.